Nano-oxide thin films deposited via atomic layer deposition on microchannel plates
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چکیده
منابع مشابه
Nano-oxide thin films deposited via atomic layer deposition on microchannel plates
Microchannel plate (MCP) as a key part is a kind of electron multiplied device applied in many scientific fields. Oxide thin films such as zinc oxide doped with aluminum oxide (ZnO:Al2O3) as conductive layer and pure aluminum oxide (Al2O3) as secondary electron emission (SEE) layer were prepared in the pores of MCP via atomic layer deposition (ALD) which is a method that can precisely control t...
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ژورنال
عنوان ژورنال: Nanoscale Research Letters
سال: 2015
ISSN: 1931-7573,1556-276X
DOI: 10.1186/s11671-015-0870-y